UV-LILGA applied specification processing example
High aspect honeycomb mesh
The UV-LIGA Process enables the LIGA process that uses radiated light from a giant synchrotron, with ultra violet (UV) light. With it, micro structures of high aspect ratio can be made comparatively easily on general equipment.
| Plating thickness |
60µm |
| Rib width |
10µm |
| Mesh opening rate |
Approx. 90% |
| Aspect ratio |
6 |
Improved aspect ratio of micro flow channel circuit
Plating thickness can be increased for the micro flow channel circuit listed
in the special specification, while keeping the straight profile of the sidewall.
| Plating thickness |
75µm |
| Micro flow channel |
30/30µm |
| Aspect ratio |
2.5 |
| Plating metal |
Nickel |
